Leakage in the vacuum chamber: After the system reaches the ultimate vacuum, close all valves, and the pressure in the vacuum chamber will be less than 3Pa after 1 hour.
Target size: DC cylindrical rotating target φ152×230mm
Single target DC magnetron power supply power: 80KW
Production cycle: about 90 seconds (except for plating simple film, plating reaction film)
Total installed power: 320KW (including 167KW for vacuum unit and 150KW for magnetron sputtering power supply)
Cooling water consumption: 10m3/h
Compressed air: 0.5-0.6MP
Thickness of coated glass: 3-6mm
Main equipment configuration
Vacuum chamber body: made of carbon steel material, the box body is bent into an L shape with 12mm carbon steel plate, and the flange at both ends of the container is made of 35mm carbon steel plate. The top flange is 40mm and the inner surface is polished. The stiffener is bent into a U-shape with 8mm carbon steel plate. The feet are square tubes. All cover plates are made of 25mm thick carbon steel plate.
Each coating room is equipped with an observation window to observe the working condition of the target 7 vacuum chambers connected in series, including the coating chamber, the front and rear pre-extraction chambers and the front and rear fine extraction chambers at both ends, and the six vacuum locks (located in the front and rear pre-extraction chambers and the front and rear fine extraction chambers). The actual size of the cabinet is subject to the design ). Front and rear pre-extraction room size: 3100 (L) × 2400 (W) × 160 (H) mm (2) Front and rear fine extraction room size: 3100 (L) × 2400 (W) × 160 (H) mm (2) Front and back transition room size: 3100 (L) × 2400 (W) × 380 (H) mm (2) Coating room size: 3250 (L) × 2800 (W) × 450 (H) mm (1)
Transmission system:
The drive shaft in the vacuum chamber is covered with an aluminum alloy tube and a rubber ring. The inner transmission is driven by a synchronous belt, and the positioning is controlled by a travel switch; the transmission bearing is a ball bearing. The transmission shaft in the coating room uses a carbon steel seamless tube outer rubber ring. The transmission mode is driven by the same chain, and the positioning is controlled by a stroke switch; the transmission shaft roller bearing uses a ball bearing. The outside of the vacuum chamber is composed of electric motors, gearboxes and other components. The transmission speed is controlled by a frequency converter. The front and back rough extraction room, front and back fine extraction room, front and back transition room, and coating room are each controlled by a frequency converter. Each of the film-in platform and the film-out platform is controlled by an inverter. Drive motor: 7 sets in total, Transmission wheelbase: about 250 mm-300 mm)
Vacuum lock part
The vacuum lock plate is made of LY-12 aluminum. The lock plate switch is driven by a cylinder and a transmission gear rack. The lock channel is 2000 × 35mm.
Vacuum box sealing device
The connecting part of the box body and the box body uses φ12mm sealing tape, and all cover plates are sealed with rubber rings (including target cover plates) Use φ 12mm sealing tape, and the sealing tape is installed on the vacuum chamber.
Vacuum system:
Front and rear rough vacuum chamber: ZJ-1200 Roots pump (2 × 11KW, Zhejiang) H-150 spool valve pump (4×11KW, Zhejiang) Front and rear fine vacuum chamber: ZJ-300 Roots pump (2×4KW, Zhejiang) KT-320 diffusion pump (4×3KW, with water cooling trap, Kerun) 2X-30 rotary vane pump (2×3KW, Sichuan Nanguang) Transition chamber, coating vacuum chamber: KT-320 diffusion pump (10 x 3KW, with water cooling trap, Kerun) ZJ-600 Roots pump (1×7.5KW, Zhejiang) 2X-70 rotary vane pump (2 units×5.5KW Sichuan Nanguang)
The roughing unit is composed of a roots pump, a slide valve pump, various valves, etc.; a high vacuum unit is composed of a diffusion pump, a roots pump, a slide valve pump, and various valves, pipelines, rubber tubes, etc., in which pipelines and connections The bolts and nuts, valves, loose flanges, etc. are made of carbon steel with electroplating on the surface.
Gas supply system:
Each target chamber is equipped with 2 flow meters, and the whole machine is equipped with 4 mass flow meters. The gas transmission pipeline uses stainless steel pipes.
Vacuum measurement:
Each chamber can be measured separately, and there are 1-2 vacuum gauge ports on the cover plate of each chamber and the foreline pipe. Equipped with low vacuum gauge: 2 sets (1 for each of the front and rear roughing chambers) Equipped with compound vacuum gauge: 4 sets (one for each of the front and rear fine extraction chamber and target chamber)
Target and power supply:
Equipped with 4 DC rotating sputtering targets, all rotating targets are respectively installed on the cover plate of the vacuum chamber. The size of the rotating target is φ152×2300mm and the target base is made of 304 stainless steel. Equipped with 4 domestic DC magnetron sputtering power supplies, each 80KW.
Film advance platform: 2500 × 2000 (length × width) (directly
connected to the washing machine),
Unloading platform: 2500×2000mm (length×width), with a rubber roller shaft on each side. It is convenient to unload the glass.
Control system:
Standard electrical control cabinet, equipped with touch screen control system, to achieve process parameters adjustable, memorable and read. The main low-voltage electrical control components Schneider and domestic Chint products. The PLC programmer adopts Mitsubishi products to ensure the reliability and stability of the control system Sex. This system can realize manual, semi-automatic and fully automatic functions. The heating current of the diffusion pump separately displays the heating current of each electric furnace. High temperature wire for external wiring of electric furnace. Chint products are used for ammeter and voltmeter.
Description of main equipment configuration
Vacuum box (carbon steel) 6 Kerun vacuum
Coating room (carbon carbon) 1 Kerun vacuum
6 sets of vacuum lock plate (aluminum alloy) Kerun Vacuum
4 sets of DC magnetron sputtering power supply (80KW) Hunan Zhongyuan
4 sets of DC magnetron rotating target holder Zhaoqing Kerun
2 pieces of titanium target pipes Kerun
2 pieces of stainless steel targets Kerun
2 ZJ-1200 Roots pumps Zhejiang Vacuum Equipment Group
4 H-150 slide valve pumps Zhejiang Vacuum Equipment Group
1 ZJ-600 Roots pump Zhejiang Vacuum Equipment Group
2 ZJ-300 Roots pumps Zhejiang Vacuum Equipment Group
2 2X-30 rotary vane pumps Sichuan Nanguang
2 2X-70 rotary vane pumps Sichuan Nanguang
KT-320 oil diffusion pump 14 sets Zhaoqing Kerun
PLC (Programmable Logic Controller) 1 set LG
7 sets of frequency converters Mitsubishi
Touch screen (10.4 inch) 1 made in Taiwan
1 set of control cabinet Kerun
4 sets of mass flow controllers (including power supply) Beijing
Spray paint on the external surface of the vacuum box;
The outer surface of the parts made of carbon steel in the studio should be rust-proofed and then sprayed; the outer surface of the vacuum pipeline is not painted.
Packaging requirements: waterproof and anti-collision during transportation and handling to avoid surface bumps.
5. The purchaser's self-equipped items:
Tap water: 15 tons-20 tons/hour, pressure ≥ 0.2Mpa (circulating water available)
2 water cooling towers of 50 cubic meters
Compressed air: air pressure 0.5-0.6MPa, consumption 0.6 m3/min.
Power supply: 380V three-phase four-wire system, the power cord is connected to the production line console.
Work room at the input end of the decoration production line: clean and dust-free.
Production consumables such as original films needed for debugging equipment on the demand side
Deionized water treatment equipment.
Water quality parameters: water output ≥ 2-3 tons/hour; resistivity ≥ 10 megohms; water pressure ≥0.1Mpa
List of spare parts shipped with the factory:
1. Travel switch 5 pcs 3. Seal 1 set 4 diffusion pump electric hob 1 set 5. Diffusion pump electric furnace wire 5pcs
FAQ:
Q1: Are you a trading company or a manufactory? A1: We are a manufactory, we supply the factory price with good quality, welcome to visit !
Q2: Why choosing AGLASSTEC ? A2: Founder of the company engaged in machinery manufacturing industry almost 20 years of experience, professional production and export of high-quality glass processing machinery, industrial automation machinery, etc. , exported to all parts of the world, we have been committed to doing a good job of products, service every customer.
Q3: Machine warranty specifications ? A3: We will provide lifelong maintenance service in the use of machinery, we will solve problems for customers free of charge, eliminate all the troubles of customers. For machines beyond the warranty period, we will always provide follow-up services and provide wearing parts for free, but we do not provide freight, local customs clearance fees and related costs.
Q4: This is the first time I buy glass machine, is it easy to operate? A4: We can provide the operation manual or video for guiding. If it is hard for you learning, We can help you by "Team viewer" online, with telephone or WhatsApp explain. And We will send our engineers to your factory to install the machines and train your staff how to operate the machines.
Q5: How to choose a suitable machine ? A5: You can tell us working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience.
Q6: How can I trust your company and your products ? A6: The whole production procedure will be under regular inspection and strict quality control. The complete machine will be tested to make sure they can work very well before being out of factory. The testing video and pictures will be available before delivery.
Q7: If machine have any problem after I ordered it, what could I do ? A7: Free parts send to you in machine warranty period if machine have any problem. Free after-sales service life for machine, please feel free contact us if your machine have any problem. We will give you 24hours service from telphone and WhatsApp.
Q8: How about the spare parts? A8: After we deal down all the things , we will offer you a spare parts list for your reference.
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